- 电子波束探针
- 电子束探测器
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electron beam prober中文什么意思
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百科释义
The electron beam prober (e-beam prober) is a specialized adaption of a standard scanning electron microscope (SEM) that is used for semiconductor failure analysis. While a standard SEM may be operated in a voltage range of 25?30?KeV, the e-beam Prober typically operates at 1?KeV.
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